removing of photoresist cleaning table

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removing of photoresist cleaning table
Posting date : Apr 15, 2014
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85-
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Features: (1) each slot can clean 2 baskets at the same time. The device has the advantages of beautiful appearance, acid good performance, convenient operation, reliable operation, is the idal silicon cleaning equipment in semiconductor production line. (2) the device is composed of machine frame part, thepart, body part, servo system, and a mechanical transmission part, electrical control system. (3) process can be automatic / manual, mechanical hand is converted by PLC control among the grooves, USA imported guide rail and the manipulator to meet the processs equence. (4) except that loading and fetching needs manual operation,other craft movement is achieved by mechanical hand,suitable for continuous production. (5) the machine with high efficiency filters meets demands of cleaning work area (1000 ~100 level, the 10 level for thetop grade). (6) the man-machine interface touch screen with safety protection fault code, fault alarm, and process number is for convenient operation and easy maintenance.

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