Pressure Sensor Dies (SE103)

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Pressure Sensor Dies (SE103)
Posting date : May 09, 2011
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Free Member Scince May 06, 2011
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85-
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SE-103 Pressure Sensor Die Model SE103 pressure sensor dies are made from high quality silicon wafer on glass through 4" MEMS process. The pressure ranges of SE103 are from 0~0.2 bar up to 0~25 bar in form of relative (gauge) pressure, or 0~1 to 0~1000 bar in form of absolute pressure. The typical non-linearity of these sensor dies is 0.25 %fso. The maximum long-term stability is 0.2 %fso/year. Features: 1. silicon on glass structure 2. pressure range & type: 0~0.2, ..., 0~25 bar, gauge 0~1, ..., 0~1000 bar, absolute 3. nonlinearity: 0.25 %fso (standard) 4. suitable for either constant current or voltage excitation

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