Pressure Sensor Dies (SE101)

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SE-101 Absolute Pressure Sensor Dies Description Featured in small size, model SE101 silicon pieworesistive sensor dies are designed for absolute pressure measurement.These pressure sensors dies are manufactured in silicon-silicon structure through MEMS technology. On the top of surface of SE101 sensor dies the bridge circuit is configued in half-open circuit with 5 solder pads for additinal adjustment and temperature compensation. The pressure range of SE101 is from 0~1 barA, ..., up to 0~35 barA. The non-linearity of these sensor dies is guaranteed to be less than 0.5 %fso. The maximum long-term stability is 0.2 %fso/year. For high volume OEM application, the SE101 sensor dies can be manufactured to customer tailored absolute pressure range or closed-bridge circuit configuration of 4 solder pads. Features: small size and high reliability in mass production limited membrane deformation for high overload pressure silicon-silicon structure for absolute pressure application pressure range: 0~1, ..., 0~35 bar nonlinearity: < 0.5 %fso suitable for either constant current or voltage excitation

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BCM Sensor Technologies bvba

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