MF sputtering coating equipment

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MF sputtering coating equipment
Posting date : Nov 10, 2009
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85-
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Detailed Description
MF sputtering coating equipment mainly integrate the technology of MF magnetron sputtering and electric arc ion evaporation,combining the ion source and the pulse bias voltage .It is full automation control when coating films. It is widely used in the watchband, watchcase,mobile shell,hardware,tableware,etc. It can coat TiN,TiC,TiCN、TiAIN,CrN,Cu,Au,Al2O3 and other decorative films. Parameter Description Mode JTL-1090 JTL-1110 JTL-1312 JTL-1612 Dimension Φ1000Χ900mm Φ1100Χ1000mm Φ1200Χ1200 mm Φ1600Χ1200 mm Coating mode and main confirguration 3 electric-arc+2 pairs of plane rectangular cathode 6 electric-arc+2 pairs of cylindrical cathode+a pairs of plane rectangular cathode 5 electric-arc+4 pairs of cylindrical cathode+a pairs of plane rectangular cathode 6 electric-arc+8 pairs of cylindrical cathode+a pairs of plane rectangular cathode Film Types Metal films,Dielectric films,Compound films,Reaction films,Muti-layer function films Power source Electric arc power supply,DC magnetron power supply,MF magnetron power supply.Pulse bias voltage power supply.ion source power supply. Vacuum Chamber Structure Pre-open vertical(single) door ,postposition pump system,double water-cooling Vacuum system Molecule pump(diffusion pump)+Roots pump +Mechanical pump Utimate vacuum 2.0Χ10 -4 Pumping speed Pumping time less than 15 minutes ,from atmospheric pressure to 3Χ10 -3 Pa Movement of the workpiece Revolution/rotation,variable frequency speed adjustable Baking temperature of the workpiece Adjustable and controllable from room temperature to a350oC,radiation heating Control mode Full automation control system PC+PLC/PC+HMI Remark We can design the machine according to you workpiece and special technological requirement

ECROBOT CO., Ltd, Business Registration Number : 220-88-71747, CEO J.W.Park, TEL : +82-2-552-7676, E-mail : E-mail : Contact us
Address : (Hwanghwa B/D 11F, Yeoksam-dong)320, Gangnam-daero, Gangnam-gu, Seoul, South Korea
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