semiconductor wet bench

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semiconductor wet bench
Posting date : Sep 22, 2009
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85-
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Detailed Description
Wet Bench Application • Developing Process • Etching Process • Stripping Process • Cleaning Process • Mask Cleaner Suitable Size 2"-8" Wafer Product Type Wet Bench or Wet station Operation Mode Auto / Semi-Auto / Manual Specialty Build-to-order available Available Option • Class 100 or 1000 • CIM Connect • Chemical Supply System • CO2 / IR • PLC / PC Base / PAC • Datalogic • Temperature Measurement Data Acquisition System Product Feature • Use quality pipe and valve componen • Use PAC for electronic controller • Robotic horizontal and vertical stroke for high accuracy, stability and positioning • Quarantine zone for both acidic gas and electrical substance • Flexible disposition scheme for QDR • Modularized pipeline installment allows swift and convenient maintenance • Product design is highly adaptable to fit in customized environment according to the actual needs

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