CHY-T1280A-3Z4C Laboratory CVD Tube Furnace with O.D80*1000mm Quartz Tube Laboratory CVD Tube Furnace CVD machine price
1.O.D80*1000mm high purity quartz tube
2.High quality ceramic fiber chamber
3.PID Programmable controller
4.Three gas way mass flow controller with precision gas flow controller
5.Two stage Vacuum Pump
CHENGYI-CVD System APPLICATION
1.Laboratory heat thermal processing
2.High Vacuum Sintering Heating Annealing Brazing
3.Laboratory Thin Film Preparation,Nano tube growthing
4.Laboratory CVD system,graphene growthing,preparation.
PRODUCT PARAMETERS
Product Name | |
Modle No. | CHY-T1280A-3Z4C |
Heating zones | Single heating zone |
Heating zone length | 400mm |
Constant temperature zone length | 200mm |
Tube Material | high purity quartz tube |
Tube diameter | O.D80*I.D74*1000mm Quartz Tube |
Tube Length | 1000mm,750mm,1000mm,1200mm as enquiry |
Thermcouple | K type |
Maximum heating temper | 1150 dgree |
Heating rate | 20c/min,adjustable suggestion 10 degree/min |
Heating element | Fe-Co-Al by Mo alloy |
Sealing Method | stainless steel vacuum flange |
Vacuum Air-tightness | 9.8×10-4Pa |
Temperature Accuracy | ±1℃ |
Control Mode | Intelligent PID programmable Control,30 steps sintering curve restore |
Mass Flow Controller | 3 gas way mass flow controller |
Flowmeter Core | 304 stainless steel |
Measure Accuracy | +/- 1.0% F.S |
Pressure Range | -0.1~0.15MPa |
A way gas range | 0~100SCCM |
B way gas range | 0~200SCCM |
C way gas range | 0~500SCCM |
Vacuum Pump | 4C |
Power Supply | AC220V 50Hz |
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