multi-arc ion plating
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sample stage
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Planetary sample table, OD 305mm, six stations around
The workpiece can be hung on the support bar of each station
Peripheral speed 1 ~ 20rpm adjustable
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Multi-arc ion target
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φ84mm X 2
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Vacuum chamber
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Size:φ300mm *400mm
watch window:φ100mm
anti-dazzling screen
Material:304stainless steel
opening mode:front opening door
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Film thickness control
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Crystal mode, optional multi-channel
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Vacuum system
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Front pump:Bipolar rotary vane pump
Extraction interface:KF16
Secondary pump:turbo molecular pump
Extraction interface:CF160
Vacuum gauge:Resistance and ionization compound vacuum gauge
Exhaust rate:mechanical pump:1.1L/s;molecular pump: 600L/s
ultimate vacuum:1.0E-5Pa
Voltage:AC 220V 50/60Hz
Pumping rate:rotary vane pump:1.1L/S
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Control system
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automatic control
Operation interface: touch screen + operation panel
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Other
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Voltage:AC380V,50Hz
Dimensions:1000mm* 800mm * 1500mm
Total power:5kW
Weight:350kg
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