Single-target RF magnetron sputtering vacuum PVD coating machine

Product

Posting date : Jul 17, 2020

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Membership

Free Member Scince Jul 13, 2020

FOB Price

11000

Min. Order Quantity

Supply Abillity

Port

qingdao,shanghai,

Payment Terms

T/T, L/C, Pay Later,Western Union,VISA

Package

wooden box packaging

Keyword :

magnetron sputtering

Category

MACHINERY & ELECTRICAL | Nuclear re | Machines a | Other mach

Contact

jibin wang

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Product Detail

Company Info

Quick Detail

Place of Origin

China [CN]

Brand Name

CYKY

Model Number

CY-MSP300S-RF

HS-CODE

8479-89

Package & Delivery Lead Time

Package

wooden box packaging

Detailed Description

Single-target RF magnetron sputtering coater CY-MSP300S-RF

Single-target RF magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment independently developed by our company. It has the characteristics of miniaturization and standardization.

The magnetron target head has 1 inch 2 inches and 3 inches to choose from. Customers can choose the target according to the size of the substrate to be plated.
The device is equipped with 300W RF power supply, which can be used for sputtering of non-metal film and optical film. According to the experimental requirements, other specifications of DC or RF power supply can be selected to realize the coating operation of various materials.
The coating machine is equipped with two-channel high-precision mass flowmeter. If you have other requirements, you can customize the gas path of up to four-channel mass flowmeters to meet the complex gas environment construction requirements.
The instrument is equipped with advanced turbomolecular pump sets, the ultimate vacuum is up to 1.0E-5Pa, and other types of molecular pumps are available for purchase. Molecular pump gas path is controlled by multiple solenoid valves, you can open the chamber to take out the sample without shutting down the pump, greatly improving your work efficiency.
This product can be equipped with an integrated industrial computer to control the system. In the computer program, most functions such as vacuum pump control and sputtering power control can be realized, which can further improve your experimental efficiency.

Single-target RF magnetron sputtering coater application:

The device can be used to prepare single-layer ceramic films, dielectric films, optical films, oxide films, hard films, PTFE films, and the like. Compared with similar equipment, the single-target magnetron sputtering coater is not only widely used, but also has the advantages of small size and easy operation. It is an ideal equipment for laboratory preparation of material films, especially suitable for research on solid electrolyte and OLED in the laboratory.

Single-target RF magnetron sputtering coater technical parameters:

Sample stage	Size:φ185mm Temperature control accuracy:±1℃ Heating temperature:Max 500℃ Rotate speed:1-20rpm adjustable
Magnetron Sputtering target head	2”×1 (1”,2”,3”optional) Circulating water chiller with flow rate of 10L/min
Vacuum chamber	Chamber size:φ300mm×300mm Watch window:φ100mm Chamber material:Stainless steel Opening mode:Top cover removable
Mass flow meter	2 channels; measuring range 100sccm; 100sccm (can be customized according to customer needs)
Vacuum system	Model:CY-GZK103-A Pumping interface:KF40 Molecular pump:CY-600 Exhaust interface:KF16 Backing pump:rotary vane pump Vacuum measurement:Compound vacuum gauge Ultimate vacuum:1.0E-5Pa Power supply:AC;220V 50/60Hz Pumping rate:Molecular pump: 600L/S rotary vane pump: 1.1L/S Comprehensive gas pumping performance: vacuum up to 1.0E-3Pa in 20 minutes
Power configuration	RF power supply ×1;Max output power:300W
Other parameters	Supply voltage:AC220V,50Hz Overall size:600mm×650mm×1280mm Total power:2KW Total Weight:300kg