Linear Stages

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Linear Stages
Posting date : Aug 03, 2007
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90-
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Non-contact direct-drive system ensures ultraprecision motion with high dynamics and reliability Extra-large, high-efficiency linear motor minimizes heat generation Ironless moving coil has no cogging for ultra smooth velocity control Ultra-quiet anti-creep crossed roller bearings assure ripple-free …… Non-contact direct-drive system ensures ultraprecision motion with high dynamics and reliability Extra-large, high-efficiency linear motor minimizes heat generation Ironless moving coil has no cogging for ultra smooth velocity control Ultra-quiet anti-creep crossed roller bearings assure ripple-free motion without cage migration High precision glass scale encoder provides accurate position feedback with 50 nm repeatability Sub-nm resolution with low interpolation error for outstanding speed stability and motion sensitivity No moving cables inside the stage, reduced particle generation and improved reliability

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