Silicon Pressure Sensor Die/Wafer

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Output:Analog Sensor Usage:Pressure Sensitive Sensor Theory:Mems Material:Mixture Size:1X1mm2:Small Size Piezo-Resistive Pressure Sensor Export Markets:Global Description The series of pressure sensor is a small size piezo-resistive pressure sensor. The Die size is 1x1mm2. When the input voltage is 3VDC the sensor produces mV DC output voltage which is direct proportion of the input pressure. Pressure sensor is the absolute pressure sensor, and we can also offer the differential pressure mode. All the products can be customized according to your requirement. Features Solid, MEMS technique, high reliability Low cost, tiny size Standard pressure range: 0-100KPa;0-150KPa;0-700KPa;0-1700KPa Nonlinearity: < 0.20%FSO Silicon/silicon bonding wafer, high stability Application For high resolution absolute sensor systems Engine control Tire Gauge Barometers, Altimeters, Variometers, Sphygmomanometer Min Typ Max Unit Remarks Excitation Voltage 5.0 V Excitation Current 1 mA Span FS Rang 100KPa 50 70 90 mV 1 150KPa 70 100 150 mV 200KPa 70 100 150 mV 350KPa 70 100 150 mV 700KPa 70 100 150 mV 1000KPa 80 120 180 mV 1.7MPa 100 150 200 mV Offset -35 35 mV 2 TC Span -24 -19 -15.5 %FS/100 3 TC Offset -7 +7 %FS/100 3 TCR +18 +22 +33 % /100 3 Linearity -0.45 -0.15 +0.45 %FS 4 Bridge impedance 5 KΩ Proof Pressure 2X Fixed FS Burst Pressure 4X Fixed FS Operating Temperature -40 +125 Storage Temperature -55 +150 Notes: 1. Measured at 5V constant voltage excitation. 2. The offset is ±50mV for 100KPa,150KPa 3. Measured from 0 to 60 C 4. Defined as best straight line. Full Scale Pressure kPa bar mbar PSI atm mmHg mmH2O kg/cm 2 100 1 100 15 0.99 750 10207 1 700 7 700 102 6.9 5250 71451 7.1 1700 17 1700 247 16.8 12754 173524 17.3 Model Pressure Ranges KPa PSA 100 010 200 PSA 070 020 350 035 700 070 1000 Pressure range Pressure type 100 1700 170 3500 350

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WS Sensor Technology Co., Ltd.

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