Quick Detail
Place of Origin
HS-CODE
96-
Package & Delivery Lead Time
Detailed Description
The ICP Water Vapor Cryo pump will increase product throughput in your existing vacuum system 20% to 100% and improve the quality of deposition. (Made by Ion-Tek, Korea , GIIL’s brother company)
The IC model works on the principle of Meissner trapping. Water vapor is captured by condensation on a cryogenically cooled surface, called a Meissner coil. The Meissner (cryocoil) is mounted directly in the vacuum chamber so conductance is not limited by ports, manifolds, valves, and baffles. The cryo coil is easy to install and can be adapted to fit any system. It does not need a high-vacuum valve.
General Specifications
• -100° to -150°C (-148° to -238°F, 173 to 123 K)
• Fast cooling, fast defrost (Within 3 minutes)
• Simple tube-type cold element (e.g., cryocoil or Meissner coil)
• Defrost up to 30°C
• Cryo condenses water vapor in vacuum systems with speeds to 70,000~220,000 L/sec, vacuum levels to 2.5 x 10-10torr, depending on model and application
• Provides very fast pumping speeds for water vapor, which is typically 65% to 95% of the gas load in high vacuum systems.
• High-vacuum pump down time cut by 25% to 75%
• Increased product throughput of 20% to 100%
• Lower water vapor partial pressure during processing for higher quality, better adhesion and more reproducible deposition
• Superior in cost/performance to liquid nitrogen cooled Meissners
Features
• Factory-charged with CFC-free refrigerant
• Temperature indicator with differential analog output
• Electronic controller to terminate defrost
• Control module for local manual control
• Remote connector to permit operation with your controller or your manual controls. (Remote operation requires relays, switches and wiring by end-users)
• Equipped with 100% compatible parts with Genuine “Polycold” cryopump for easy maintenance throughout the world.
Suction Temperature: Better than -100 ~ -130 C,
Discharge Temperature: Better than -130 ~ -150 C,
Vacuum Levels : To 4.0 x 10-10 torr
Model Comp.
(KW) Polycold type
Equivalent. Through-put
(L/Sec) Meissener coil
(Dia : Inch,
Length: M) Dimension
(mm)
(W*D*H) Cooling
water
(L/Min) Time for
Cool &
Defrost
ICP -
060 3.5 PFC- 650 65,000 1/2” 10 M 800*
600*1500 60 5 Min.
ICP -
130 7.5 PFC-1000 130,000 5/8” 25 M 900*
700*1700 90 5 Min.
ICP -
200 7.5 PFC-1100HC 200,000 5/8” 40 M 1000*
800*1800 110
5 Min.
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