Quick Detail
Place of Origin
HS-CODE
96-
Package & Delivery Lead Time
Detailed Description
GIIL technology covers following high-tech sputtering web coater.
It is of the same type as Von ardenne’s Fosa or Leybold’s SmartWeb.
For ITO, AR coating, Solar Cell multi-layered purpose.
GIIL technology covers following high-tech sputtering web coater.
It is of the same type as Von ardenne’s Fosa or Leybold’s SmartWeb.
For ITO, AR coating, Solar Cell multi-layered purpose.
Characteristics of Web coating system.
Vacuum pumping
Differential pumping systems. With gate valves, Lip Seals, baffles
Chamber Overall pumping :
TMP or Diffusion pump with baffle for regulating pumping speed
Coating zone pumping: TMPs
Or separate pumping with large diffusion pump, valves.
Polycold meissner coil , each located inside each zones, below sputtering cathodes, by 1 Polycold system (200,000 L/S)
According Booster pumps and Direct-Drive Rotary pumps.
Winding system
• AC servo motor driving
• Load-cell tension pickup
-Forward-Reverse winding system.
PRE-TREATMENT SYSTEM
I/R heating system (Halogen Lamp, 20Kw)
Pre-treatment with DC(MF) sputter or
Linear Ion system
Sputtering Cathodes
6 cathodes for ITO , SiO2, TiO2, Nb, Co, Ni (Dual MF, Single DC, Pulse P/S)
IN-SITU MEASUREMENT SYSTEM
By Ohm resistance measuring
By reflective index measuring
This type of sputtering machine can also equipped with evaporation source.
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