sapphire substrate

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sapphire substrate
Posting date : May 21, 2010
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71-
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Detailed Description
Crystal materials: 99,996% of Al2O3, High Purity, Monocrystalline Crystal quality: Block marks, twins, Color, micro-bubbles and dispersal centers are non-existent Diameter: 2inch-7inch Thickness: 250±15 µm, 330±15 µm, 430±15 µm, 500±15 µm, 550±15 µm, 600±15 µm Orientation: C-plane(0001), M-plane, A-plane, R-plane Primary flat length: 16.0±0.8 mm, 22.0±1.0mm, 32.5±1.5mm TTV≤10 µm , ≤15µm, ≤20µm , ≤30µm LTV≤10 µm , ≤15µm, ≤20µm , ≤30µm TIR≤10 µm , ≤15µm, ≤20µm , ≤30µm BOW≤10 µm , ≤15µm, ≤20µm , ≤30µm Warp≤10 µm , ≤15µm, ≤20µm , ≤30µm Front Surface: Epi-polished, Ra< 0.2nm (By AFM) Back Surface: Fine ground (Ra=0.5 to 1.2 µm) or Epi-polished (Ra< 0.2 nm) Cleaning/packaging: Class 100 clean room cleaning, vacuum packaging derived nitrogen; 25 pieces in one cassette or single packaging.

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