Middle-scale PVD system

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Middle-scale PVD system
Posting date : Nov 09, 2006
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S07-
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Middle-scale PVD system The STN-10 Series coating system was specially designed for large products decorative coating purposes with high productivity. The vacuum chamber unit has a cylinder design with one door opened on the front of the process chamber and 12 or 14 cathode Arc Ion Sources. The extreme high rate of ionization in arc evaporation technology provides excellent adhesion properties of the coating to the substrate surface and dense, strong layers. For the required golden color the system is provided with Titanium targets and Zirconium targets, also including Titanium-Nitride (TiN) and Zirconium-Nitride (ZrN) process. The advanced Controlled Arc system with controlled steering of the arc ensures a smooth and homogeneous layer. The controlled Arc-system also provides high coating uniformity and excellent target utilization efficiency. Chamber, vacuum system, gas flow and controls are chosen of first class design and ensure a reliable, repeatable production with high system availability. Inner size of the chamber ----- Diameter:1000~1250mm;Height: 1250mm~1500mm Vacuum pumping system ----- Oil diffusion pump + Root's pump + Rotary pump Controlling system -------- PLC & Touch Screen or PLC & PC Ionization source & Bias power supply ----- Number of targets:10~14; Power of BIAS: 15kW~30kW

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