Quick Detail
Place of Origin
Brand Name
zmsh
Model Number
6inch-001
HS-CODE
83-
Package & Delivery Lead Time
Package
Packaged in a class 100 clean room environment, in
Delivery Lead Time
within 40days
Detailed Description
6inch sic substrates ,6inch sic wafers, sic crystal ingots ,
sic crystal block ,sic semiconductor substrates,Silicon Carbide Wafer
- - - -
6 inch diameter, Silicon Carbide (SiC) Substrate Specification | |
Grade | Zero MPD Grade | Production Grade | Research Grade | Dummy Grade |
Diameter | 150.0 mm0.2mm |
Thickness | 350 m25m or 50025un |
Wafer Orientation | Off axis : 4.0 toward< 1120> 0.5 for 4H-N On axis : <0001>0.5 for 6H-SI/4H-SI |
Primary Flat | {10-10}5.0 |
Primary Flat Length | 47.5 mm2.5 mm |
Edge exclusion | 3 mm |
TTV/Bow /Warp | 15m /40m /60m |
Micropipe Density | 1 cm-2 | 5 cm-2 | 15 cm-2 | 100 cm-2 |
Resistivity | 4H-N | 0.015~0.028 cm |
4/6H-SI | 1E5 cm |
Roughness | Polish Ra1 nm |
CMP Ra0.5 nm |
Cracks by high intensity light | None | 1 allowed, 2 mm | Cumulative length 10mm, single length2mm |
Hex Plates by high intensity light | Cumulative area 1% | Cumulative area 2% | Cumulative area 5% |
Polytype Areas by high intensity light | None | Cumulative area2% | Cumulative area5% |
Scratches by high intensity light | 3 scratches to 1wafer diameter cumulative length | 5 scratches to 1wafer diameter cumulative length | 5 scratches to 1wafer diameter cumulative length |
Edge chip | None | 3 allowed, 0.5 mm each | 5 allowed, 1 mm each |
Contamination by high intensity light | None |
- - - -
Because the 6inch size crystal growprocess(lapped and polishing)technical difficulties,we just can provide the 6inch Dummy Grade as common products in 30daysand Productions Grade but needingto bereservedfor90days. About our company SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014. We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components widely used in electronics, optics, optoelectronics and many other fields. We also have been working closely with many domestic and oversea universities, research institutions and companies, provide customized products and services for their R&D projects. It's our vision to maintaining a good relationship of cooperation with our all customers by our good reputatiaons.
0 likes
China [CN] 
Click enlarge Image