Quick Detail
Place of Origin
Brand Name
zmkj
Model Number
4inch--N,4H-semi
HS-CODE
83-
Package & Delivery Lead Time
Package
Packaged in a class 100 clean room environment, in
Delivery Lead Time
10-20days
Detailed Description
4inch dia100m 4H-N type Production grade DUMMY grade SiC substrates,Silicon Carbide substrates for semiconductor device,
Application areas
1 high frequency and high power electronic devices Schottky diodes,
JFET, BJT, PiN, diodes, IGBT, MOSFET
2 optoelectronic devices: mainly used in GaN/SiC blue LED substrate material (GaN/SiC) LED
Advantagement
Low lattice mismatch
High thermal conductivity
Low power consumption
Excellent transient characteristics
High band gap
Silicon Carbide SiC crystal substrate wafer carborundum
SILICON CARBIDE MATERIAL PROPERTIES
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Product Name: | Silicon carbide (SiC) crystal substrate |
Product Description: | 2-6inch |
Technical parameters: |
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Cell structure | Hexagonal |
Lattice constant | a = 3.08 c = 15.08 |
Priorities | ABCACB (6H) |
Growth method | MOCVD |
Direction | Growth axis or Partial (0001) 3.5 |
Polishing | Si surface polishing |
Bandgap | 2.93 eV (indirect) |
Conductivity type | N or seimi ,high purity |
Resistivity | 0.076 ohm-cm |
Permittivity | e (11) = e (22) = 9.66 e (33) = 10.33 |
Thermal conductivity @ 300K | 5 W / cm. K |
Hardness | 9.2 Mohs |
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Specifications: | 6H N-type 4H N-type semi-insulating dia2 "x0.33mm, dia2" x0.43mm,dia2''x1mmt, 10x10mm, 10x5mm Single throw or double throw, Ra <10A |
Standard Packaging: | 1000 clean room, 100 clean bag or single box packaging |
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2. substrates size of standard
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4 inch diameter Silicon Carbide (SiC) Substrate Specification |
Grade | Zero MPD Grade | Production Grade | Research Grade | Dummy Grade |
Diameter | 100.0 mm0.5 mm |
Thickness | 350 m25m (200-500um thickness also is ok) |
Wafer Orientation | Off axis : 4.0 toward <1120> 0.5 for 4H-N/4H-SI On axis : <0001>0.5 for 6H-N/6H-SI/4H-N/4H-SI |
Micropipe Density | 1 cm-2 | 5 cm-2 | 15 cm-2 | 50 cm-2 |
Resistivity | 4H-N | 0.015~0.028 cm |
6H-N | 0.02~0.1 cm |
4/6H-SI | 1E5 cm |
Primary Flat and length | {10-10}5.0 ,32.5 mm2.0 mm |
Secondary Flat Length | 18.0mm2.0 mm |
Secondary Flat Orientation | Silicon face up: 90 CW. from Prime flat 5.0 |
Edge exclusion | 3 mm |
TTV/Bow /Warp | 15m /25m /40m |
Roughness | Polish Ra1 nm ,CMP Ra0.5 nm |
Cracks by high intensity light | None | 1 allowed, 2 mm | Cumulative length 10mm, single length2mm |
Hex Plates by high intensity light | Cumulative area 1% | Cumulative area 1% | Cumulative area 3% |
Polytype Areas by high intensity light | None | Cumulative area 2% | Cumulative area 5% |
Scratches by high intensity light | 3 scratches to 1wafer diameter cumulative length | 5 scratches to 1wafer diameter cumulative length | 5 scratches to 1wafer diameter cumulative length |
edge chip | None | 3 allowed, 0.5 mm each | 5 allowed, 1 mm each |
Contamination by high intensity light | None |
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Sic wafer ingots 2-6inch and other customized size also can be provided.
3.Pictures of delivery Products before
Delivery Package