spec
|
unit
|
6"
|
8"
|
10"
|
12”
|
Diameter/size(or square)
|
mm
|
150
|
200
|
250
|
300
|
Tolerance (±)
|
mm
|
0.2
|
0.2
|
0.2
|
0.2
|
Thickness
|
mm
|
0.30 or more
|
0.40 or more
|
0.50 or more
|
0.50 or more
|
Primary reference flat
|
mm
|
57.5
|
Semi-notch
|
Semi-notch
|
Semi-notch
|
LTV (5mmx5mm)
|
µm
|
< 0.5
|
< 0.5
|
< 0.5
|
< 0.5
|
TTV
|
µm
|
< 3
|
<3
|
<5
|
<5
|
Bow
|
µm
|
±30
|
±40
|
±40
|
±40
|
Warp
|
µm
|
≤ 40
|
≤ 50
|
≤ 50
|
≤ 50
|
PLTV(5mm*5mm)<0.4um
|
%
|
≥95%
|
≥95%
|
≥95%
|
≥95%
|
Edge Rounding
|
mm
|
||||
Surface Type
|
|
||||
Polished side Ra
|
nm
|
||||
Back Side Criteria
|
µm
|
Item
|
Capability
|
Diameter
|
5mm - 400mm
|
Thickness
|
50μm or more
|
Dimensional Tolerance
|
+/- 25μm
|
Thickness Tolerance
|
+/- 5μm
|
Thickness Variation(TTV)
|
< 2μm
|
Flatness
|
1/10 Wave/Inch
|
Surface Roughness (RMS)
|
<5Ǻ
|
Scratch and Dig
|
10/5
|
Particle Size
|
<10μm
|
Bow/Warp
|
<10μm
|